Title:

Cr ohmic contact on an Ar+ ion modified 6H-SiC(0001) surface

Group publication title:

Optica Applicata

Creator:

Grodzicki, Miłosz ; Chrzanowski, Jan ; Mazur, Piotr ; Zuber, Stefan ; Ciszewski, Antoni

Contributor:

Gaj, Miron. Redakcja ; Urbańczyk, Wacław. Redakcja

Subject and Keywords:

optyka ; silicon carbide ; chromium ; electric contacts ; AFM

Description:

Optica Applicata, Vol. 39, 2009, nr 4, s. 765-772

Abstrakt:

Chromium layers were vapor deposited under ultrahigh vacuum onto samples cut out of a single crystal of 6H-SiC(0001) that were Ar+ bombardment modified. The substrates and electrical contacts formed by the Cr adlayer were characterized in situ by current-sensing atomic force microscopy (CS-AFM) and X-ray photoelectron spectroscopy (XPS). Cr/SiC contacts reveal a good I–V characteristic linearity without the use of heavy impurity doping and high-temperature annealing.

Publisher:

Oficyna Wydawnicza Politechniki Wrocławskiej

Place of publication:

Wrocław

Date:

2009

Resource Type:

artykuł

Source:

<sygn. PWr A3481II> ; click here to follow the link ; click here to follow the link

Language:

eng

Relation:

Optica Applicata ; Optica Applicata, Vol. 39, 2009 ; Optica Applicata, Vol. 39, 2009, nr 4 ; Politechnika Wrocławska. Wydział Podstawowych Problemów Techniki

Rights:

Wszystkie prawa zastrzeżone (Copyright)

Access Rights:

Dla wszystkich w zakresie dozwolonego użytku

Location:

Politechnika Wrocławska